UV-3D Printing System

System Performance

  1. LD source @405 nm, power ≥100 mW, laser lifetime ≥15,000 hours.
  2. Supported standard size: Accurate exposure within ≥150mm × 150mm range, minimum substrate size: 5mm × 5mm.
  3. Lithography resolution: Minimum feature size ≤0.5 µm.
  4. Equipped with alignment and overlay capability, alignment accuracy: ≤±0.5 µm.
  5. Efficiency: Writing speed ≥100 mm²/min @1 µm; ≥200 mm²/min @2 µm.
  6. XYZ, and θ multi-axis precision motion system. Equipped grating positioning with position resolution ≤10 nm.
  7. Support thickness: 0-15 mm.
  8. θ-axis adjustment range: ≥7.5 degrees.
  9. Auto-focus capability: Z-axis adjustment precision ≤10 nm, warpage tolerance ≥100 µm.
  10. Exposure optional: Including scanning exposure, grayscale exposure, and drag exposure.
  11. Supports small BMP image repetition and large BMP image stitching.
  12. Supports 256-level 3D grayscale lithography.
  13. Supports multiple file formats, including GDSII, BMP, and STL.
  14. Processing head ：10X, 20X, 50X
  15. Cabinet-style structure with integrated marble base and high-precision air-floating vibration isolation system.